ERM (Pump Exhaust Pressure Reduction Module)
The present company has developed an ERM-L & ERM-PHK (Exhaust pressure Reduction Module Process Hot Kit) since the end of 2008 with the purpose of the development which is directed to saving energy by adapting to the dry pump which is currently used for the sake of the semiconductor manufacture line. When classifying by the items the energy (consumption power) used for the process equipments in the semiconductor device manufacture process, the process pump accounts for 52% of the consumption power used for the process equipment (source: 1997, 2000 and 2002 SEMATECH Energy Research). Considering the above matters, we have developed it as one part of the green growth (with regard to the energy saving sector).
ERM-L (Exhaust pressure Reduction Module Load lock)
ERM-PHK (Exhaust pressure Reduction Module_Process Hot Kit)